3M

CMP Pad Conditioners

3M CMP pad conditioners are optimized for extended pad and disk life

Image of 3M CMP Pad Conditioners3M diamond, soft-brush, and micro replicated chemical mechanical planarization (CMP) pad conditioners are engineered to meet the most demanding process requirements. Using precisely engineered, micro replicated, diamond-coated ceramic structures, 3M Trizact™ pad conditioners provide excellent, highly consistent disk-to-disk performance for the most demanding advanced node processes. The diamond pad conditioners use a 3M exclusive sintered abrasive technology to provide a powerful chemical and mechanical bond between diamonds and substrate, helping keep diamonds intact and in place for consistent long-term conditioning performance.

Resources
Features
  • Used for a broad range of CMP processes and process steps
  • Optimized for extended pad and disk life
  • Broad range of solutions for different pad hardnesses, slurries, and process requirements
  • Long pad and disk life can help reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Customizable conditioning aggressiveness
Applications
  • CMP
  • Chemical mechanical polishing
  • Wafer manufacturing
  • Advanced node (memory and logic)
  • Hard disk drive manufacturing

Diamond Pad Conditioners

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
3M DIAMOND PAD CONDITIONER A3799A37993M DIAMOND PAD CONDITIONER A37990 - Immediate$1,898.79View Details
3M DIAMOND PAD CONDITIONER X181CX181C3M DIAMOND PAD CONDITIONER X181C0 - Immediate$2,156.21View Details
3M DIAMOND PAD CONDITIONER X253CX253C3M DIAMOND PAD CONDITIONER X253C0 - Immediate$2,156.21View Details
3M DIAMOND PAD CONDITIONER X252SX252S3M DIAMOND PAD CONDITIONER X252S0 - Immediate$2,156.21View Details
3M DIAMOND PAD CONDITIONER X150CX150C3M DIAMOND PAD CONDITIONER X150C0 - Immediate$2,156.21View Details
3M DIAMOND PAD CONDITIONER X251SX251S3M DIAMOND PAD CONDITIONER X251S0 - Immediate$2,156.21View Details
3M DIAMOND PAD CONDITIONER A7101A71013M DIAMOND PAD CONDITIONER A71010 - Immediate$2,497.62View Details
3M DIAMOND PAD CONDITIONER S122,S1223M DIAMOND PAD CONDITIONER S122,0 - Immediate$3,125.19View Details
3M DIAMOND PAD CONDITIONER B138LB138L3M DIAMOND PAD CONDITIONER B138L0 - Immediate$3,125.19View Details
3M DIAMOND PAD CONDITIONER A189HA189H3M DIAMOND PAD CONDITIONER A189H0 - Immediate$3,266.42View Details
3M DIAMOND PAD CONDITIONER A189LA189L3M DIAMOND PAD CONDITIONER A189L0 - Immediate$3,269.13View Details
3M DIAMOND PAD CONDITIONER A2813A28133M DIAMOND PAD CONDITIONER A28130 - Immediate$3,269.13View Details
3M DIAMOND PAD CONDITIONER A3700A37003M DIAMOND PAD CONDITIONER A37000 - Immediate$3,508.64View Details

Diamond Pad Conditioners - C Series

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
3M DIAMOND PAD CONDITIONER C280-C280-S3M DIAMOND PAD CONDITIONER C280-0 - Immediate$3,001.94View Details
3M DIAMOND PAD CONDITIONER C260-C260-S3M DIAMOND PAD CONDITIONER C260-0 - Immediate$3,001.94View Details
3M DIAMOND PAD CONDITIONER C SERC260-A, 4.25 IN3M DIAMOND PAD CONDITIONER C SER0 - Immediate$3,001.94View Details
3M DIAMOND PAD CONDITIONER C SERC250-A3M DIAMOND PAD CONDITIONER C SER0 - Immediate$3,001.94View Details
3M DIAMOND PAD CONDITIONER C SERC250-S3M DIAMOND PAD CONDITIONER C SER0 - Immediate$3,001.94View Details
3M DIAMOND PAD CONDITIONER C SERC280-A3M DIAMOND PAD CONDITIONER C SER0 - Immediate$3,001.94View Details
3M DIAMOND PAD CON C SERIES, C21C2120-S3M DIAMOND PAD CON C SERIES, C210 - Immediate$3,001.94View Details
3M DIAMOND PAD CON C SERIES, C21C2120-A3M DIAMOND PAD CON C SERIES, C210 - Immediate$3,001.94View Details
3M DIAMOND PAD CON C SERIES, C21C2160-S3M DIAMOND PAD CON C SERIES, C210 - Immediate$3,001.94View Details

Trizact™ Pad Conditioners

ImageManufacturer Part NumberDescriptionAvailable QuantityPriceView Details
3M TRIZACT PAD CONDITIONER, B75-B75-2990-5S23M TRIZACT PAD CONDITIONER, B75-0 - Immediate$4,301.50View Details
3M TRIZACT PAD CONDITIONER, B5-MB5-M990-5S23M TRIZACT PAD CONDITIONER, B5-M0 - Immediate$4,301.50View Details
3M TRIZACT PAD CONDITIONER B25-2B25-2910-5S23M TRIZACT PAD CONDITIONER B25-20 - Immediate$4,528.86View Details
3M TRIZACT PAD CONDITIONER B6-19B6-1900-5S23M TRIZACT PAD CONDITIONER B6-190 - Immediate$4,528.86View Details
3M TRIZACT PAD CONDITIONER T SERB6T-1900-5S23M TRIZACT PAD CONDITIONER T SER0 - Immediate$4,657.85View Details
3M TRIZACT PAD COND B25T-2910-5SB25T-2910-5S23M TRIZACT PAD COND B25T-2910-5S0 - Immediate$4,657.85View Details
3M TRIZACT PAD COND B5T-2910-5S2B5T-2910-5S23M TRIZACT PAD COND B5T-2910-5S20 - Immediate$2,850.61View Details
Published: 2025-10-02