MEMS Sensors

Accelerometers
Murata is the global market leader in low-acceleration sensors for automotive applications. The extensive accelerometer product range includes high-performance digital and analog accelerometers for both safety-critical automotive and industrial applications. Murata accelerometers are based on the company's proprietary 3D MEMS technology and they offer a number of excellent product features and benefits for the most demanding applications. The sensing element and the measuring ASIC are assembled in a dual-in-line or dual-in-flat-line plastic package with pins for surface-mount and re-flow soldering. They are environmentally protected with silicone gel resulting in excellent performance and reliability in a humid environment and at temperature cycling.

In addition, the robust sensing element design with over damped frequency response enables excellent performance even in harsh and vibrating environments. The measuring direction is parallel or perpendicular to the mounting plane. The ASIC includes an on-chip EEPROM memory with the calibration coefficients for unit interchangeability. Murata accelerometers include enhanced failure detection: digitally-activated self-test, calibration memory parity or sum check and continuous connection failure detection. The products are intended for horizontal or vertical measurements. The zero-point temperature dependence is less than 1 mg/°C.

Inclinometers
Murata inclination sensors are an optimum choice for high-accuracy leveling and inclination measurement instruments. The highest-accuracy is available with SCA103T series that use differential measurement principle to compensate all common-mode error and noise effects. The best shock durability of the MEMS market provides trouble-free measurements in moving machines, vehicles, airplanes, construction machines, and hand held devices.

Gyroscopes
Murata Electronics Oy develops and manufactures gyroscope components and combined sensors (including gyroscope and accelerometer) based on the company's proven 3D MEMS technology and highly-integrated electronics. Industrial gyroscopes offer a performance level that typically has been available only for expensive module products. Sensing elements and the measuring circuitry are assembled into a pre-molded plastic dual-in-line (DIL) package, protected with silicone gel, and covered with a stainless steel lid. All products are RoHS compatible and suitable for lead-free re-flow soldering.