SXUV100 Large-Area Photodiode for EUV and VUV Detection

The SXUV100 from Opto Diode is a high-performance, windowless silicon photodiode optimized for extreme ultraviolet (EUV) and soft X-ray detection. Featuring a large 100 mm² active area, this detector offers stable responsivity across a broad spectral range from 1 nm to 200 nm, making it ideal for demanding environments such as EUV lithography, synchrotron beamline diagnostics, and plasma monitoring. Engineered for precision and durability, the SXUV100 provides high quantum efficiency and low noise operation in both high-vacuum and radiation-intense conditions.

Its robust design ensures consistent performance over extended exposure to energetic photons, while the lack of a window eliminates absorption losses and enables direct photon interaction with the active surface. With proven reliability in high-radiation scientific and industrial applications, the SXUV100 delivers the accuracy and long-term stability required for critical measurement systems. Opto Diode has strict quality control and low dark current performance, further enhancing its value for system designers and researchers.