MEMS products for device miniaturization and configuration of more advanced functions.

MEMS Flow Sensors

D6F-PH Series MEMS Differential Pressure Sensor

A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments

• Economical
• High accuracy of ±3%RD
• Linearized and temperature compensated
• Digital output (I²C communication)
• High flow impedance to reduce the influence of bypass configuration

	Part Number	Description
	D6F-PH0025AD1	SENSOR AIRFLOW 0-250Pa PCB TERM
	D6F-PH0505AD3	SENSOR AIRFLOW +/- 50Pa PCB TERM
	D6F-PH5050AD3	SENSOR AIRFLOW +/- 500Pa PCB TERM

D6F Series MEMS Flow Sensor

High Accuracy Mass Flow Sensing

• High Accuracy
• Applicable to air, non-corrosive gas, natural gas
• Low power consumption
• Anti-dust performance
• RoHS Compliant

	Part Number	Description
	D6F-V03A1	AIRFLOW SENSOR 0-3 M/SEC 3.3V
	D6F-W01A1	AIRFLOW SENSOR 0-1 M/SEC 12/24V
	D6F-W04A1	AIRFLOW SENSOR 0-4 M/SEC 12/24V
	D6F-W10A1	SENSOR AIRFLOW MNT 12/24V
	D6F-P0010A2	SENSOR AIRFLOW 0-50KPA W/CONN
	D6F-P0010A1	SENSOR AIRFLOW 0-50KPA PCB TERM
	D6F-P0001A1	SENSOR FLOW TYPE 0.1 LPM MICRO
	D6F-01A1-110	SENSOR AIR FLOW TYPE 0-1LTR PLST
	D6F-02A1-110	SENSOR AIR FLOW TYPE 0-2LTR METL
	D6F-03A3-000	MASSFLOW SENSOR 0-3 LPM
	D6F-10A6-000	AIRFLOW SENSOR MEMS 10L/MIN
	D6F-20A5-000	FLOW SENSOR MEMS 20L/MIN
	D6F-20A6-000	AIRFLOW SENSOR MEMS 20L/MIN
	D6F-50A6-000	FLOW SENSOR MEMS 50L/MIN

MEMS Pressure Sensors

2SMPP MEMS Gauge Pressure Sensor

Featuring Small Size and Low Power Consumption

• Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H)
• Superior electrical characteristics
• Economical solution
  • Offset voltage of -2.5±4 mV
  • Span voltage of 31.0±3.1 mV
• Low Power consumption of 0.2 mW
• Low Temperature Influence

	Part Number	Description
	2SMPP-02	SENSOR PRESSURE 0-5PSI 0-37KPA
	2SMPP-03	SENSOR PRESSURE -7-7PSI-50-50KPA

2SMPB Absolute Pressure Sensor

Piezo Resistive Bridge Technology with Integrated CMOS

• Altitude Detection
• High Accuracy ±6Pa (±50cm)
• Low Power Consumption due to Automatic Sleep Mode
• Compact package: 4mm x 4mm chip
• Temperature rating: ±2º C
• 24-Bit I2C Digital Output

	Part Number	Description
	2SMPB-01-01	ABSOLUTE PRESSURE SNSR 30-110KPA

MEMS Thermal Sensor

D6T Series MEMS Thermal Sensor

High Sensitivity Enables Detection of Stationary Human Presence

• OMRON’s unique MEMS and ASIC technologies achieve a high SNR
• Superior noise immunity with a digital output
• High-precision area temperature detection with low crosstalk field of view characteristics
• Application notes are available
• RoHS compliant

	Part Number	Description
	D6T44L06	PIR SENSOR 4X4 PIXEL THERMAL PCB
	D6T8L06	PIR SENSOR 1X8 PIXEL THERMAL PCB